Compatible with OHT and AGV;

② 1~4Load ports can be configured according to customer needs;

③ Cleanliness level meets ISO Class 1 standard;

④ Compact structure and small footprint;

⑤ Modular design, low maintenance cost;

⑥ Meet SEMI S2 and SEMI S8 standards;

⑦ Compatible with 8-inch and 12 inch wafers;

⑧ Load port or SMIF can be configured according to requirements

⑨ Compatible with wafers ranging from 100 μ m to 775 μ m, vacuum EE, Bernoulli EE, and clamp EE can be configured according to customer requirements;

⑩ EE flipping function can be configured according to customer needs.